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5. International Workshop "Diagnostic systems for process monitoring"

On 28 September 2022, the international workshop - "Diagnostic Systems for Process Monitoring" took place in the historic inn "RÄUBERSCHÄNKE" in Oederan/Saxony.

A total of 17 people from industry and research took part. In five interesting lectures on the topics of plasma diagnostics, process monitoring/process control and optical measuring methods from industry and research, the current state of research was presented and an outlook on future developments was given. In the future, the workshop will take place every two years.

We would like to thank all speakers for their valuable contribution.